Experiments and analysis of the two-step growth of InGaAs on GaAs substrate
Author:
Affiliation:
1. State Key Laboratory of Luminescence Applications
2. Changchun Institute of Optics, Fine Mechanics and Physics
3. Chinese Academy of Sciences
4. Changchun, China
5. University of Chinese Academy of Sciences
Abstract
In this highlight, a mechanism has been proposed to explain the dislocation density reduction in the epitaxial layer by a LT-buffer.
Publisher
Royal Society of Chemistry (RSC)
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2015/CE/C5CE00979K
Reference26 articles.
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2. Dark current characteristics of GaAs-based 2.6 µm InGaAs photodetectors on different types of InAlAs buffer layers
3. Ultralow leakage In/sub 0.53/Ga/sub 0.47/As p-i-n photodetector grown on linearly graded metamorphic In/sub x/Ga/sub 1-x/P buffered GaAs substrate
4. Heteroepitaxy of In0.53Ga0.47As on GaAs substrate by low pressure metalorganic chemical vapor deposition for the OEIC applications
5. Ga0.28In0.72As/Al0.28In0.72As 2 μm photodiode heterostructures prepared by atmospheric pressure MOCVD
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