1. B.
Bednář
, J.Králíček and J.Zachoval, Materials Science Monographs 76 Resists in Microlithography and Printing, Elsevier, Amsterdam, 1993
2. K.
Jain
, Excimer Laser lithography, SPIE Press, Bellingham, WA, 1990
3. J. P.
Fouassier
, Photoinitiation, Photopolymerization and Photocuring – Fundamentals and Applications, Hanser publisher, Munich, 1995