Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling-Reference-Cited by-同舟云学术

Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling

Published:2017 Issue:9 Volume:32 Page:1798-1804
ISSN:0267-9477
Container-title:Journal of Analytical Atomic Spectrometry
language:en
Short-container-title:J. Anal. At. Spectrom.

Author:

Gaiaschi S.¹²³^ORCID,Richard S.¹²³,Chapon P.¹²³,Acher O.¹²³

Affiliation:

1. HORIBA FRANCE SAS

2. 91120 Palaiseau

3. France

Abstract

We developed an in situ measurement technique implemented on a Glow Discharge Optical Emission Spectrometry (GD-OES) instrument, which provides the depth information during the profiling process.

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2017/JA/C7JA00146K

Reference12 articles.

1. Glow-discharge spectrometry for direct analysis of thin and ultra-thin solid films

2. Pulsed radiofrequency glow discharge optical emission spectrometry for the direct characterisation of photovoltaic thin film silicon solar cells

3. Pulsed glow discharges for analytical applications

4. Sputter depth profiling of Mo/B4C/Si and Mo/Si multilayer nanostructures: A round-robin characterization by different techniques

5. The Analytical scientist, May 2014, https://theanalyticalscientist.com/fileadmin/tas/pdf-versions/TAS_Issue_0514.pdf

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