Characterization and study of high conductivity antimony-doped tin oxide thin films grown by mist chemical vapor deposition-Reference-Cited by-同舟云学术

Characterization and study of high conductivity antimony-doped tin oxide thin films grown by mist chemical vapor deposition

Published:2023 Issue:20 Volume:13 Page:13456-13462
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Liu Li¹^ORCID,Ueda Mariko²,Kawaharamura Toshiyuki¹²³

Affiliation:

1. School of System Engineering, Kochi University of Technology, 185 Miyanokuchi, Tosayamada, Kami, Kochi, 782-8502, Japan

2. Intelligent Mechr. Sys. Eng. Course, Kochi University of Technology, 185 Miyanokuchi, Tosayamada, Kami, Kochi, 782-8502, Japan

3. Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada, Kami, Kochi, 782-8502, Japan

Abstract

ATO films are fabricated by mist CVD system. Supporting solutions including H2O, HNO3 and HCl are used to improve film properties. Experimentally, ATO films with low resistivity of 6.58 × 10−4 Ω cm, high transmittance of 90% are obtained successfully.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2023/RA/D3RA00359K

Reference43 articles.

1. Retracted: Structural, electrical, and optical properties of ATO thin films fabricated by dip coating method

2. Properties of transparent zinc‐stannate conducting films prepared by radio frequency magnetron sputtering

3. Fabrication of Textured Rough SnO2:F Films on Glass Using TiO2 Film as a Buffer Layer

4. Evolution of Atomically Stepped Surface of Indium Tin Oxide Thin Films Grown on Nanoimprinted Glass Substrates

5. Transparent conducting Sb-doped SnO2 thin films grown by pulsed laser deposition

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