1. Institute of Microstructure Technology (IMT)
2. Karlsruhe Institute of Technology (KIT)
3. Karlsruhe
4. Germany
5. Institute of Applied Physics (APH)
6. Karlsruhe Institute of Technology
7. 76128 Karlsruhe
8. Now with Institute of Nanotechnology (INT)
9. Microfluidic ChipShop GmbH
10. 07747 Jena
11. Now with Carl Zeiss AG
12. Institute of Photonics and Quantum Electronics (IPQ)