Comparison of effects produced on solid surfaces by bombardment with neutrals or ions in the keV range
Author:
Publisher
Royal Society of Chemistry (RSC)
Link
http://pubs.rsc.org/en/content/articlepdf/1985/F2/F29858100985
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Ion versus neutral irradiation of thin films of amorphous SiO2: an in situ X-ray photoelectron spectroscopy study;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-08
2. Depth profiles of ion‐implanted fluorine in tin‐oxide films prepared by atmospheric‐pressure chemical vapor deposition;Journal of Applied Physics;1993-05
3. Physico-chemical modifications of solid surfaces by interaction with ion beams;Surface and Interface Analysis;1992-06
4. Implanted Tin Oxide Thin Films for Selective Gas Sensing;Springer Proceedings in Physics;1992
5. Modification of the structure and composition of tin oxide by ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-07
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