1. Department of Chemical and Biomolecular Engineering, University of California, Berkeley, California, 94720, USA
2. Berkeley Sensor & Actuator Center, University of California, Berkeley, California, 94720, USA
3. State Key Laboratory of Fire Science, Department of Safety Science and Engineering, University of Science and Technology of China, Hefei, Anhui 230026, P. R. China
4. School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, Shanxi 710049, P. R. China
5. School of Resources and Civil Engineering, Northeastern University, Shenyang, Liaoning 110819, P. R. China
6. TDK InvenSense Inc., San Jose, California, 95110, USA
7. Department of Mechanical Engineering, Stanford University, Stanford, CA 94305, USA