Fast and safe microwave-assisted glass channel-shaped microstructure fabrication
Author:
Affiliation:
1. Department of Mathematics and Physics “Ennio De Giorgi”
2. Università del Salento
3. Lecce
4. Italy
5. NNL
6. Nanoscience Institute–CNR Via Arnesano 16
7. Dipartimento di Ingegneria dell'Innovazione
8. 73100 Lecce
Abstract
Microwave-assisted wet etching intensifies the glass etching action under safe working and finely monitored operative conditions and it produces smooth deep channels in short processing times with reduced underetching effects.
Publisher
Royal Society of Chemistry (RSC)
Subject
Biomedical Engineering,General Chemistry,Biochemistry,Bioengineering
Link
http://pubs.rsc.org/en/content/articlepdf/2015/LC/C4LC01419G
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