Wafer-scale, highly uniform, and well-arrayed suspended nanostructures for enhancing the performance of electronic devices

Author:

Zhao Zhi-Jun1,Ahn Junseong23ORCID,Lee Dongheon4,Jeong Chan Bae5,Kang Mingu3,Choi Jungrak3,Bok Moonjeong2,Hwang Soonhyoung2,Jeon Sohee2,Park Sooyeon4,Ko Jiwoo23,Chang Ki Soo5,Choi Jung-Woo4,Park Inkyu3ORCID,Jeong Jun-Ho2ORCID

Affiliation:

1. Institute of Smart City and Intelligent Transportation, Southwest Jiaotong University, No. 999 Pidu District, Chengdu, Sichuan, China

2. Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea

3. Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea

4. School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea

5. Center for Scientific Instrumentation, Korea Basic Science Institute (KBSI), Daejion 34133, Republic of Korea

Abstract

Wafer-scale, highly uniform, well-arrayed suspended nanostructures play an important role in enhancing the performance of a diverse group of nanodevices.

Funder

National Research Foundation of Korea

Ministry of Science, ICT and Future Planning

Ministry of Science and ICT, South Korea

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

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