Analysis of shallow depth profiles of titanium nitride and N-implanted titanium by GD-OES: the ‘hydrogen effect’ after the discharge startup and a correction thereof-Reference-Cited by-同舟云学术

Analysis of shallow depth profiles of titanium nitride and N-implanted titanium by GD-OES: the ‘hydrogen effect’ after the discharge startup and a correction thereof

Published:2017 Issue:12 Volume:32 Page:2476-2484
ISSN:0267-9477
Container-title:Journal of Analytical Atomic Spectrometry
language:en
Short-container-title:J. Anal. At. Spectrom.

Author:

Weiss Zdeněk¹²³⁴^ORCID,Vlcak Petr⁵⁶⁷⁸⁴^ORCID

Affiliation:

1. Institute of Physics CAS

2. Dept. of Material Analysis

3. 182 21 Prague 8

4. Czech Republic

5. Department of Physics

6. Faculty of Mechanical Engineering

7. Czech Technical University in Prague

8. 16607 Prague

Abstract

A method is presented for the correction of the GD-OES depth profiles of N-implanted titanium, perturbed by the hydrogen effect on the discharge startup.

Funder

Grantová Agentura České Republiky

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2017/JA/C7JA00281E

Reference26 articles.

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3. V. Hoffmann and A.Quentmeier , Glow Discharge Optical Emission Spectroscopy (GD-OES) , in Surface and Thin Film Analysis: A Compendium of Principles, Instrumentation and Applications , ed. G. Friedbacher and H. Bubert , Wiley-VCH Verlag GmbH & Co. KGaA , Weinheim , 2nd edn, 2011

4. Z. Weiss , Surface Hardened Steels , 1997 , ch. 13.6. in the monograph [1], pp. 641–651

5. Analysis of nitrogen-influenced surface near zones of ferrous materials by glow discharge spectroscopy (GDOS)

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