Fabrication of monolithic 3D micro-systems
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Biomedical Engineering,General Chemistry,Biochemistry,Bioengineering
Link
http://pubs.rsc.org/en/content/articlepdf/2011/LC/C0LC00331J
Reference30 articles.
1. M. Madou , Fundamentals of Microfabrication the Science of Miniaturization, CRC, Boca Raton, Florida, 2002
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