1. School of Electronic Information Engineering, Hebei University of Technology, Tianjin, 300130, People's Republic of China
2. Tianjin Key Laboratory of Electronic Materials and Devices, Hebei University of Technology, Tianjin, 300130, People's Republic of China
3. Hebei Collaborative Innovation Center of Microelectronic Materials and Technology on Ultra Precision Processing (CIC), Tianjin, 300130, China
4. Hebei Engineering Research Center of Microelectronic Materials and Devices (ERC), Tianjin, 300130, China