Tailoring the crystal growth of quartz on silicon for patterning epitaxial piezoelectric films-Reference-Cited by-同舟云学术

Tailoring the crystal growth of quartz on silicon for patterning epitaxial piezoelectric films

Published:2019 Issue:9 Volume:1 Page:3741-3752
ISSN:2516-0230
Container-title:Nanoscale Advances
language:en
Short-container-title:Nanoscale Adv.

Author:

Zhang Qianzhe¹²³⁴⁵,Sánchez-Fuentes David⁵⁶⁷⁸⁹,Gómez Andrés¹²³⁴^ORCID,Desgarceaux Rudy⁵⁶⁷⁸⁹,Charlot Benoit⁵⁶⁷⁸⁹^ORCID,Gàzquez Jaume¹²³⁴^ORCID,Carretero-Genevrier Adrián⁵⁶⁷⁸⁹^ORCID,Gich Martí¹²³⁴^ORCID

Affiliation:

1. Institut de Ciència de Materials de Barcelona (ICMAB)

2. Consejo Superior de Investigaciones Científicas (CSIC)

3. 08193 Bellaterra

4. Spain

5. Institut d'Électronique et des Systèmes (IES)

6. UMR 5214

7. CNRS

8. Université de Montpellier

9. 34095 Montpellier

Abstract

Epitaxial films of piezoelectric α-quartz could enable the fabrication of sensors with unprecedented sensitivity for prospective applications in electronics, biology and medicine.

Funder

H2020 European Research Council

Agence Nationale de la Recherche

China Scholarship Council

Ministerio de Ciencia e Innovación

Agència de Gestió d'Ajuts Universitaris i de Recerca

Publisher

Royal Society of Chemistry (RSC)

Subject

General Engineering,General Materials Science,General Chemistry,Atomic and Molecular Physics, and Optics,Bioengineering

Link

http://pubs.rsc.org/en/content/articlepdf/2019/NA/C9NA00388F