1. Suzhou Academy, Xi'an Jiaotong University, Suzhou, Jiangsu 215123, China
2. Nano Science and Technology Institute, University of Science and Technology of China, Suzhou, Jiangsu 215123, China
3. Suzhou Institute for Advanced Research, University of Science and Technology of China, Suzhou, Jiangsu 215123, China
4. Department of Electrical Engineering and Computer Engineering and Department of Chemical Engineering and Materials Science, Michigan State University, East Lansing, Michigan 48824, USA
5. Fraunhofer USA, Inc., Center Midwest, Division for Coatings and Diamond Technologies, Michigan State University, East Lansing, MI 48824, USA