1. Center of Ultra-precision Optoelectronic Instrument Engineering
2. Harbin Institute of Technology
3. Harbin 150080
4. China
5. Key Laboratory of Micro-systems and Micro-structures Manufacturing (Harbin Institute of Technology)
6. Key Laboratory of Semiconductor Materials Science and Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices
7. Institute of Semiconductors
8. Chinese Academy of Sciences
9. Beijing 100083
10. School of Instrumentation Science and Engineering
11. Department of Physics
12. Suzhou Institute of Nano-Tech and Nano-Bionics
13. Suzhou 215125