1. Helmholtz-Zentrum Dresden-Rossendorf
2. Institute of Ion Beam Physics and Materials Research
3. 01328 Dresden, Germany
4. State Key Laboratory of Functional Material for Informatics
5. Shanghai Institute of Microsystem and Information Technology
6. Chinese Academy of Sciences
7. Shanghai 200050, China
8. Technische Universität Dresden
9. 01062 Dresden, Germany