Faceted nanostructure arrays with extreme regularity by self-assembly of vacancies

Author:

Ou Xin12345,Heinig Karl-Heinz123,Hübner René123,Grenzer Jörg123,Wang Xi4567,Helm Manfred12389,Fassbender Jürgen12389,Facsko Stefan123

Affiliation:

1. Helmholtz-Zentrum Dresden-Rossendorf

2. Institute of Ion Beam Physics and Materials Research

3. 01328 Dresden, Germany

4. State Key Laboratory of Functional Material for Informatics

5. Shanghai Institute of Microsystem and Information Technology

6. Chinese Academy of Sciences

7. Shanghai 200050, China

8. Technische Universität Dresden

9. 01062 Dresden, Germany

Abstract

On terraces of crystalline surfaces vacancies created by ion impacts nucleate and form depressions which coarsen and finally lead to 3D morphology patterns. Depending on the crystal orientation, two fold, three-fold, four-fold, or six-fold symmetric patterns evolve on different surfaces.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

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