1. MicroNano System Research Center
2. Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education & College of Information Engineering
3. Taiyuan University of Technology
4. Jinzhong 030600
5. China
6. Institute of Atomic and Molecular Sciences
7. Shaanxi University of Science and Technology
8. Xi'an 710021
9. People's Republic of China
10. Key Laboratory of Interface Science and Engineering in Advanced Materials (Taiyuan University of Technology)
11. Ministry of Education
12. Taiyuan
13. 030024