Structural analyses of carbon films deposited at different total mass rates in a hot-filament CVD system
Author:
Affiliation:
1. Department of Physics, COMSATS University Islamabad, Islamabad Campus, 45550, Park Road, Pakistan
Abstract
Funder
Türkiye Bilimsel ve Teknolojik Araştırma Kurumu
Publisher
Royal Society of Chemistry (RSC)
Subject
General Materials Science,Chemistry (miscellaneous)
Link
http://pubs.rsc.org/en/content/articlepdf/2023/MA/D3MA00555K
Reference47 articles.
1. Growth of diamond particles from methane-hydrogen gas
2. Enhanced nucleation and large-scale growth of CVD diamond via surface-modification of silicon-incorporated diamond-like carbon thin films
3. Effect of surface treatment on hot-filament chemical vapour deposition grown diamond films
4. Switching dynamics of morphology-structure in chemically deposited carbon films – A new insight
5. Insight into temperature impact of Ta filaments on high-growth-rate diamond (100) films by hot-filament chemical vapor deposition
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