1. International Collaborative Laboratory of 2D Materials for Optoelectronics Science and Technology of Ministry of Education, Institute of Microscale Optoelectronics, Shenzhen University, Shenzhen 518060, China
2. Department of Mechanical Engineering, University of Hong Kong, Pokfulam Road, Hong Kong
3. Physical Sciences and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal, Kingdom of Saudi Arabia
4. Corporate Research, Taiwan Semiconductor Manufacturing Company (TSMC), 168 Park Ave. 2, Hsinchu Science Park, Hsinchu 30075, Taiwan
5. Engineering Technology Research Center for 2D Material Information Function Devices and Systems of Guangdong Province, Institute of Microscale Optoelectronics, Shenzhen University, Shenzhen 518060, China