1. East China Institute of Photo-Electron ICs, No. 89 Longshan Road, Suzhou 215163, Jiangsu Province, People's Republic of China
2. Information Materials and Intelligent Sensing Laboratory of Anhui Province, Industry-Education-Research Institute of Advanced Materials and Technology for Integrated Circuits, Anhui University, No. 111 Jiulong Road, Hefei 230601, Anhui Province, People's Republic of China