Reaction control of tetraethyl orthosilicate (TEOS)/O3 and tetramethyl orthosilicate (TMOS)/O3 counter diffusion chemical vapour deposition for preparation of molecular-sieve membranes-Reference-Cited by-同舟云学术

Reaction control of tetraethyl orthosilicate (TEOS)/O3 and tetramethyl orthosilicate (TMOS)/O3 counter diffusion chemical vapour deposition for preparation of molecular-sieve membranes

Published:2000 Issue:19 Volume:2 Page:4465-4469
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Yamaguchi Takeo,Ying Xin,Tokimasa Yasuhiko,Nair Balagopal N.,Sugawara Takashi,Nakao Q—Shin-ichi

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2000/CP/B004642F

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