1. School of Materials Science and Engineering, Harbin Institute of Technology, No. 92 Xidazhi Street, Harbin 150001, PR China
2. Space Environment Simulation Research Infrastructure, Harbin Institute of Technology, Harbin 150001, PR China
3. Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education, Harbin Institute of Technology, Harbin 150080, PR China