Accurate determination of the layer thickness of a multilayer polymer film by non-invasive multivariate confocal Raman microscopy

Author:

Zou Mingyi1234ORCID,Barton Bastian1234,Geertz Guru1234,Brüll Robert1234

Affiliation:

1. Fraunhofer Institute for Structural Durability and System Reliability LBF

2. Material Analytics

3. D-64289 Darmstadt

4. Germany

Abstract

We present a confocal Raman depth profiling technique combined with multivariate spectral decomposition. The method allows for non-invasive layer structure and chemical composition determination on polymer multilayer films with micrometer accuracy.

Publisher

Royal Society of Chemistry (RSC)

Subject

Electrochemistry,Spectroscopy,Environmental Chemistry,Biochemistry,Analytical Chemistry

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