Direct determination of trace impurities in high-purity silicon nitride by axial viewed inductively coupled plasma optical emission spectrometry using a slurry nebulization technique
Author:
Affiliation:
1. Shanghai Institute of Ceramics
2. Chinese Academy of Sciences
3. Shanghai 200050
4. China
5. Department of Chemistry
6. Fudan University
7. Shanghai 200433
Abstract
A simple, rapid and reliable method was developed for the determination of trace impurities in high-purity silicon nitride (nm- and μm-sized) by ICP-OES using a slurry nebulization technique.
Funder
National Natural Science Foundation of China
Publisher
Royal Society of Chemistry (RSC)
Subject
Spectroscopy,Analytical Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2015/JA/C4JA00429A
Reference33 articles.
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2. The effect of impurities on the densification of reaction-bonded silicon nitride (RBSN)
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