1. Key Laboratory of Materials for High-Power Laser
2. Shanghai Institute of Optics and Fine Mechanics
3. Chinese Academy of Sciences
4. Shanghai
5. China
6. Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing
7. Green Photonics and Department of Optical Science and Engineering
8. Fudan University
9. Shanghai 200433
10. State Key Laboratory of Surface Physics and Key Laboratory of Micro and Nano Photonic Structures (Ministry of Education)
11. Collaborative Innovation Center of Advanced Microstructures