1. Key Laboratory of Microelectronic Devices and Integrated Technology
2. Institute of Microelectronics
3. Chinese Academy of Sciences
4. Beijing 100029
5. China
6. School of Information Science and Engineering
7. Shandong University
8. Shandong 266237
9. CAS Key Laboratory for Standardization and Measurement for Nanotechnology
10. National Centre for Nanoscience and Technology
11. Beijing 100190