Synthesis of large-area monolayer and few-layer MoSe2 continuous films by chemical vapor deposition without hydrogen assistance and formation mechanism

Author:

Yan Hui12345ORCID,Yu Tong12345,Li Heng678910,Li Zhuocheng12345,Tang Haitao12345,Hu Hangwei12345,Yu Hao12345,Yin Shougen12345

Affiliation:

1. Tianjin Key Laboratory of Photoelectric Materials and Devices

2. School of Materials Science and Engineering

3. Tianjin University of Technology

4. Tianjin 300384

5. China

6. Fujian Provincial Key Laboratory of Semiconductors and Applications

7. Collaborative Innovation Center for Optoelectronic Semiconductors and Efficient Devices

8. Department of Physics

9. Xiamen University

10. Xiamen 361005

Abstract

Large-area continuous MoSe2 films have been synthesized by APCVD method without the assistance of hydrogen. The theory was proposed to account quantitatively for the formation behavior of the MoSe2 films.

Funder

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

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