Study of deposition parameters and growth kinetics of ZnO deposited by aerosol assisted chemical vapor deposition
Author:
Affiliation:
1. CEIT-Basque Research and Technology Alliance (BRTA)
2. 20018 Donostia/San Sebastián
3. Spain
4. Universidad de Navarra
5. Tecnun
Abstract
Impact of deposition parameters, microstructure and growth kinetics analysis of ZnO grown by Aerosol-assisted Chemical Vapor Deposition (AACVD).
Funder
European Commission
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2021/RA/D1RA03251H
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