PE-ALD of Ge1−xSx amorphous chalcogenide alloys for OTS applications

Author:

Kim Myoungsub12345ORCID,Kim Youngjun1234,Lee Minkyu1234,Hong Seok Man564,Kim Hyung Keun564,Yoo Sijung564,Kim Taehoon564,Chung Seung-min1234ORCID,Lee Taeyoon1234,Kim Hyungjun1234ORCID

Affiliation:

1. School of Electrical and Electronic Engineering

2. Yonsei University

3. Seoul

4. Republic of Korea

5. SK Hynix

6. Gyeonggi-do

Abstract

Three-dimensional (3D) cross-point (X-point) technology, including amorphous chalcogenide-based ovonic threshold switching (OTS) selectors, is bringing new changes to the memory hierarchy for high-performance computing systems.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Reference46 articles.

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5. S. Yu , Y.Deng , B.Gao , P.Huang , B.Chen , X.Liu , J.Kang , H. Y.Chen , Z.Jiang and H. S. P.Wong , Proc. – IEEE Int. Symp. Circuits Syst., 2014, pp. 421–424

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