Synthesis and material characterization of amorphous and crystalline (α-) Al2O3via aerosol assisted chemical vapour deposition
Author:
Affiliation:
1. Materials Chemistry Centre
2. Department of Chemistry
3. University College London
4. London WC1H 0AJ
5. UK
Abstract
The facile synthesis of Al2O3 in the amorphous and corundum phase on glass and quartz substrates, respectively, is reported.
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2016/RA/C6RA24018F
Reference18 articles.
1. Combustion chemical vapour deposition of Al2O3 films: Effect of temperature on structure, morphology and adhesion
2. Crystallinity of Al2O3 films deposited by metalorganic chemical vapor deposition
3. CVD of Al2O3 Thin Films Using Aluminum Tri-isopropoxide
4. Factors influencing the κ-Al2O3 → α-Al2O3 phase transformation during CVD growth
5. Synthesis and characterisation of novel aluminium and gallium precursors for chemical vapour deposition
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