1. CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei, Anhui 230026, China
2. CAS Center For Excellence in Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei, Anhui 230026, China
3. Institute of Advanced Semiconductors and Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and Devices, ZJU-Hangzhou Global Scientific and Technological Innovation Center, Hangzhou, Zhejiang 311200, China
4. State Key Laboratory of Silicon Materials and Advanced Semiconductors and School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
5. Hefei National Laboratory, University of Science and Technology of China, Hefei, Anhui 230088, China