A low-cost low-maintenance ultraviolet lithography light source based on light-emitting diodes

Author:

Erickstad M.123,Gutierrez E.123,Groisman A.123

Affiliation:

1. Department of Physics

2. University of California, San Diego

3. USA

Abstract

An LED-based UV-light source producing collimated uniform illumination over a large area is built and used to fabricate PDMS microchannels with near-rectangular profiles and depths up to 300 μm.

Publisher

Royal Society of Chemistry (RSC)

Subject

Biomedical Engineering,General Chemistry,Biochemistry,Bioengineering

Reference9 articles.

1. Frequency-domain fluorescence microscopy with the LED as a light source

2. I. T. Young , Y.Garini, H. R. C.Dietrich, W.van Oel and G. L.Lung, LEDs for fluorescence microscopy, 2004

3. Fluorescence microscopy: Established and emerging methods, experimental strategies, and applications in immunology

4. A Portable, Benchtop Photolithography System Based on a Solid-State Light Source

5. J. Kim , S.Paik, F.Herrault and M. G.Allen, presented in part at the Proc. Solid-State Sensors and Actuators Workshop, Hilton Head, June, 2012

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