Infrared spectroscopy depth profiling of organic thin films

Author:

Yu Jinde1234,Xing Yifan1234,Shen Zichao1234,Zhu Yuanwei1234,Neher Dieter567ORCID,Koch Norbert8910711ORCID,Lu Guanghao1234ORCID

Affiliation:

1. Frontier Institute of Science and Technology and State Key Laboratory of Electrical Insulation and Power Equipment

2. Xi’an Jiaotong University

3. Xi’an

4. China

5. Institut für Physik und Astronomie, Universität Potsdam

6. Potsdam 14476

7. Germany

8. Institut für Physik & IRIS Adlershof

9. Humboldt-Universität zu Berlin

10. Berlin 12489

11. Helmholtz-Zentrum Berlin für Materialien und Energie GmbH

Abstract

FDD-IR spectra combined with soft plasma etching is introduced to study organic film property along film-depth. It provides insights into different kinds of organic films, all equipment and methodology are easily accessible in laboratories worldwide.

Funder

China Postdoctoral Science Foundation

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Publisher

Royal Society of Chemistry (RSC)

Subject

Electrical and Electronic Engineering,Process Chemistry and Technology,Mechanics of Materials,General Materials Science

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