1. Department of Applied Physics, College of Science, Zhejiang University of Technology, Hangzhou, China
2. Center for Optics & Optoelectronics Research (COOR), Collaborative Innovation Center for Information Technology in Biological and Medical Physics, College of Science, Zhejiang University of Technology, Hangzhou, China
3. State Key Laboratory of Silicon and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University, 38 Zheda Road, Hangzhou, 310027, China