Investigation of the electrical properties of standard and low-gas-flow ICPs using novel probes for the direct measurements of RF voltage and current in the load coil and the corresponding calculation of the ICP power

Author:

Voronov M.1234,Hoffmann V.1234,Birus D.564,Engelhard C.7894ORCID,Buscher W.1011124

Affiliation:

1. IFW Dresden

2. Institute for Complex Materials

3. D-01171 Dresden

4. Germany

5. Ingenieurbüro Dr. Dietrich Birus

6. D-04442 Zwenkau

7. University of Siegen

8. Department of Chemistry & Biology

9. D-57076 Siegen

10. University of Münster

11. Institute of Inorganic and Analytical Chemistry

12. D-48149 Münster

Abstract

For the first time RF voltage and current were measured directly at the ICP load coil.

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

Reference18 articles.

1. Inductively Coupled Plasma in Analytical Atomic Spectrometry, ed. A. Montaser and D. W. Golightly, VCH Publishers, New York, 2nd edn, 1992

2. S. Greenfield and A.Montaser, Common RF Generators, Torches, and Sample Introduction Systems, in Inductively Coupled Plasmas in Analytical Atomic Spectrometry, ed. A. Montaser and D. W. Golightly, VCH Publishers, Inc., New York, 1992, pp. 187–247

3. Design of a fixed-frequency impedance matching network and measurement of plasma impedance in an inductively coupled plasma for atomic emission spectroscopy

4. Warning indicators for the presence of plasma-related matrix effects in inductively coupled plasma-atomic emission spectrometry

5. Effect of single aerosol droplets on plasma impedance in the inductively coupled plasma

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