1. Centre for Plasma and Laser Engineering, Institute of Fluid-Flow Machinery, Polish Academy of Sciences, Fiszera 14 Street, 80-231 Gdańsk, Poland
2. Faculty of Applied Physics and Mathematics, Institute of Nanotechnology and Materials Engineering, Gdańsk University of Technology, Narutowicza 11/12 Street, 80-233 Gdańsk, Poland
3. Chemistry of Thin Film Materials, Department of Chemistry and Pharmacy, Friedrich-Alexander-Universität Erlangen-Nürnberg, Cauerstrasse 3, 91058 Erlangen, Germany
4. The Faculty of Mechanics and Technology, Rzeszów University of Technology, Kwiatkowskiego 4 Street, 37-450 Stalowa Wola, Poland
5. NanoBioMedical Centre, Adam Mickiewicz University, Wszechnicy Piastowskiej 3 St, 61-614 Poznań, Poland