Synthesis and fidelity study of ultraviolet-curable hydrogen silsesquioxane analogue as an elastomeric stamp-Reference-Cited by-同舟云学术

Synthesis and fidelity study of ultraviolet-curable hydrogen silsesquioxane analogue as an elastomeric stamp

Published:2016 Issue:84 Volume:6 Page:81364-81371
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Ramli Mohamad Riduwan¹²³⁴⁵,Ramli Rafiza⁶⁷,Mohamed Khairudin⁸⁹³⁴⁵,Ahmad Zulkifli¹²³⁴⁵

Affiliation:

1. Siloxane Polymer Research Group

2. School of Materials & Mineral Resources Engineering

3. Engineering Campus

4. Universiti Sains Malaysia

5. Nibong Tebal

6. Lumileds Malaysia Sdn. Bhd.

7. Malaysia

8. Nanofabrication and Functional Material Research Group

9. School of Mechanical Engineering

Abstract

UV curable silsesquioxane and PDMS as the spacer was synthesised and its fidelity was studied. Synergistic effect of hard segment of silsesquioxane and soft segment of PDMS contributes to the flexibility and surface roughness of HSQ analogue.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2016/RA/C6RA15947H

Reference31 articles.

1. Mass-sensitive detection of cells, viruses and enzymes with artificial receptors

2. SOFT LITHOGRAPHY

3. SUB-10 NM DIRECT PATTERNING OF OXIDES USING AN ELECTRON BEAM — A REVIEW

4. Nanoimprint lithography

5. Microcontact printing of biomolecular gratings from SU-8 masters duplicated by Thermal Soft UV NIL

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