1. State Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, People's Republic of China
2. State Key Laboratory of Silicon Materials, Center of Electron Microscopy, School of Materials Science & Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, People's Republic of China
3. BTR New Material Group Co., Ltd, GuangMing District, Shenzhen 518106, China
4. Institute of Advanced Semiconductors, Hangzhou Innovation Center, Zhejiang University, Hangzhou, Zhejiang 310027, People's Republic of China