Direct mapping of the electric permittivity of heterogeneous non-planar thin films at gigahertz frequencies by scanning microwave microscopy-Reference-Cited by-同舟云学术

Direct mapping of the electric permittivity of heterogeneous non-planar thin films at gigahertz frequencies by scanning microwave microscopy

Published:2017 Issue:5 Volume:19 Page:3884-3893
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Biagi Maria Chiara¹²³,Badino Giorgio⁴⁵⁶⁷,Fabregas Rene¹²³⁸⁹,Gramse Georg¹⁰¹¹⁶⁷,Fumagalli Laura¹²¹³¹⁴¹⁵,Gomila Gabriel¹²³⁸⁹^ORCID

Affiliation:

1. Institut de Bioenginyeria de Catalunya (IBEC)

2. Barcelona

3. Spain

4. Keysight Technologies Austria GmbH

5. Keysight Lab

6. 4020-Linz

7. Austria

8. Departament d'Enginyeries: Electrònica

9. Universitat de Barcelona

10. Johannes Kepler University Linz

11. Institute for Biophysics

12. School of Physics and Astronomy

13. University of Manchester

14. Manchester

15. UK

Abstract

We obtained maps of electric permittivity at ∼19 GHz frequencies on non-planar thin film heterogeneous samples by means of combined atomic force–scanning microwave microscopy (AFM–SMM).

Funder

Institució Catalana de Recerca i Estudis Avançats

European Commission

Ministerio de Economía y Competitividad

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2017/CP/C6CP08215G

Reference42 articles.

1. Super-resolution Aperture Scanning Microscope

2. Noncontact dielectric constant metrology of low-k interconnect films using a near-field scanned microwave probe

3. Near‐field optical‐scanning microscopy

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Calibrated microwave reflectance in low-temperature scanning tunneling microscopy;Review of Scientific Instruments;2023-10-01

2. Nanoscale Characterization of Graphene Oxide-Based Epoxy Nanocomposite Using Inverted Scanning Microwave Microscopy;Sensors;2022-12-08

3. Quantitative scanning microwave microscopy of 2D electron and hole gases in AlN/GaN heterostructures;Applied Physics Letters;2022-01-03

4. Quantitative Study of Near-Field Microwave Microscopy: Application to Metrology of Dielectrics at Nanoscale;2021 Cross Strait Radio Science and Wireless Technology Conference (CSRSWTC);2021-10-11

5. Nanoscale mapping of electric polarizability in a heterogeneous dielectric material with surface irregularities;Nanotechnology;2021-10-06