Fabrication of functional 3D multi-level microstructures on transparent substrates by one step back-side UV photolithography-Reference-Cited by-同舟云学术

Fabrication of functional 3D multi-level microstructures on transparent substrates by one step back-side UV photolithography

Published:2017 Issue:22 Volume:7 Page:13353-13361
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Kang Myeongwoo¹²³⁴,Byun Jae Hwan⁵²³⁴,Na Sangcheol¹²³⁴⁶^ORCID,Jeon Noo Li¹²³⁴⁵

Affiliation:

1. Division of WCU Multiscale Mechanical Design

2. Seoul National University

3. Seoul

4. Korea

5. School of Mechanical and Aerospace Engineering

6. Institute of Advanced Machinery and Design (SNU-IAMD)

Abstract

This paper describes simple photolithography-based methods to fabricate multi-level three-dimensional (3D) microstructures without repeated processes using flexible and transparent film substrates such as polyethylene terephthalate (PET).

Funder

National Research Foundation of Korea

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2017/RA/C6RA28812J

Reference28 articles.

1. Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography

2. Rapid Prototyping of Microstructures with Bell-Shaped Cross-Sections and Its Application to Deformation-Based Microfluidic Valves

3. Realization of refractive microoptics through grayscale lithographic patterning of photosensitive hybrid glass

4. Application of Huygens-Fresnel diffraction principle for high aspect ratio SU-8 micro-/nanotip array

5. Soft lithography for micro- and nanoscale patterning

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