Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence-Reference-Cited by-同舟云学术

Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence

Published:2018 Issue:13 Volume:10 Page:6177-6185
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Soltwisch Victor¹²³^ORCID,Hönicke Philipp¹²³^ORCID,Kayser Yves¹²³^ORCID,Eilbracht Janis¹²³,Probst Jürgen⁴⁵³^ORCID,Scholze Frank¹²³,Beckhoff Burkhard¹²³

Affiliation:

1. Physikalisch-Technische Bundesanstalt (PTB)

2. 10587 Berlin

3. Germany

4. Helmholtz-Zentrum Berlin (HZB)

5. 12489 Berlin

Abstract

The geometry of a Si₃N₄ lamellar grating was investigated experimentally with reference-free grazing-incidence X-ray fluorescence analysis.

Funder

European Association of National Metrology Institutes

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2018/NR/C8NR00328A

Reference42 articles.

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4. Optimization of non-periodic plasmonic light-trapping layers for thin-film solar cells

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