High-fidelity synthesis of microhole templates with low-surface-energy-enabled self-releasing photolithography-Reference-Cited by-同舟云学术

High-fidelity synthesis of microhole templates with low-surface-energy-enabled self-releasing photolithography

Published:2024 Issue:17 Volume:14 Page:12125-12130
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Jia Peipei¹^ORCID,Zhou Shaolin²,Cai Xiaobing³,Guo Qiuquan¹,Niu Haoran¹,Ning Wenping¹,Sun Yong¹,Zhang Dongxing¹

Affiliation:

1. Shenzhen Institute for Advanced Study, University of Electronic Science and Technology of China, Shenzhen, Guangdong, 518100, China

2. School of Electronics and Information Engineering, South China University of Technology, Guangzhou, Guangdong, China

3. School of Aerospace Engineering, Xi'an Jiaotong University, Xi'an, Shanxi, China

Abstract

A self-releasing photolithographic technique is developed to synthesize freestanding polymeric templates with high structural fidelity, smooth surfaces and excellent flexibility.

Funder

Basic and Applied Basic Research Foundation of Guangdong Province

Shenzhen Science and Technology Innovation Program

Publisher

Royal Society of Chemistry (RSC)

Link

http://pubs.rsc.org/en/content/articlepdf/2024/RA/D4RA00660G

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