Influence of internal energy and impact angle on the sticking behaviour of reactive radicals in thin a-C:H film growth: a molecular dynamics study
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://pubs.rsc.org/en/content/articlepdf/2006/CP/B517563A
Reference53 articles.
1. Properties and prospects for non-crystalline carbons
2. Diamond-like amorphous carbon
3. Electronic devices from diamond-like carbon
4. Surface reaction probabilities of radicals correlated from film thickness contours in silane chemical vapor deposition
5. Molecular dynamics simulation of the impact behaviour of various hydrocarbon species on DLC
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Effect of incident angle on the microstructure proprieties of Cu thin film deposited on Si (001) substrate;Thin Solid Films;2021-03
2. Molecular dynamics simulation study of the microstructure of a-Si:H thin film grown by oblique-angle deposition;Physica B: Condensed Matter;2018-09
3. A Reactive Force Field Study on the Interaction of Lubricant with Diamond-Like Carbon Structures;The Journal of Physical Chemistry C;2016-11-29
4. Molecular Dynamics Calculations of CH3Sticking Coefficient onto Diamond Surfaces;Plasma Processes and Polymers;2015-02-24
5. Molecular dynamics simulation for the influence of incident angles of energetic carbon atoms on the structure and properties of diamond-like carbon films;Thin Solid Films;2014-02
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3