1. Department of Electrical and Computer Engineering
2. University of Illinois at Urbana-Champaign
3. Urbana
4. USA
5. Micro and Nanotechnology Lab
6. Department of Mechanical Science and Engineering
7. Department of Chemistry
8. Taiwan Semiconductor Manufacturing Company
9. Hsinchu
10. R.O.C
11. Department of Bioengineering
12. 1270 Digital Computer Laboratory