Influence of polycrystalline material on crater shape optimization and roughness using low-power/low-pressure direct-current glow discharge mass spectrometry-Reference-Cited by-同舟云学术

Influence of polycrystalline material on crater shape optimization and roughness using low-power/low-pressure direct-current glow discharge mass spectrometry

Published:2020 Issue:7 Volume:35 Page:1450-1457
ISSN:0267-9477
Container-title:Journal of Analytical Atomic Spectrometry
language:en
Short-container-title:J. Anal. At. Spectrom.

Author:

Paudel Gagan¹²³⁴^ORCID,Khromov Sergey¹²³⁴,Kasik Martin⁵⁶⁷,Roven Hans Jørgen¹²³⁴^ORCID,Di Sabatino Marisa¹²³⁴

Affiliation:

1. Department of Materials Science and Engineering

2. Norwegian University of Science and Technology

3. 7491 Trondheim

4. Norway

5. MK2 Technologies Inc.

6. Jamesville NY 13078

7. USA

Abstract

It is likely that observation of roughness at crater bottom upon GDMS sputtering is due to differential sputtering of grains.

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2020/JA/D0JA00055H

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