Flexible and in situ fabrication of nanochannels with high aspect ratios and nanopillar arrays in fused silica substrates utilizing focused ion beam-Reference-Cited by-同舟云学术

Flexible and in situ fabrication of nanochannels with high aspect ratios and nanopillar arrays in fused silica substrates utilizing focused ion beam

Author:

Xu Yan¹²³⁴⁵,Matsumoto Nobuhiro¹²³⁴⁵

Affiliation:

1. Nanoscience and Nanotechnology Research Center

2. Research Organization for the 21st Century

3. Osaka Prefecture University

4. Osaka 599-8570

5. Japan

Abstract

We present a general methodology for the fabrication of fused silica nanochannels with high aspect ratios and nanopillar arrays using FIB milling.

Funder

Japan Society for the Promotion of Science

Asahi Glass Foundation

Ministry of Education, Culture, Sports, Science, and Technology

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

Reference35 articles.

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