Competitive effects of oxygen vacancy formation and interfacial oxidation on an ultra-thin HfO2-based resistive switching memory: beyond filament and charge hopping models
Author:
Affiliation:
1. Research Planning Office
2. Department of Materials and Chemistry
3. National Institute of Advanced Industrial Science and Technology (AIST)
4. Tsukuba
5. Japan
6. Research Center for Computational Design of Advanced Materials
Abstract
We studied the quantum transport mechanism of an ultra-thin HfO2-based resistive random access memory (ReRAM) cell with TiN electrodes and proposed the design of a sub-10 nm scale device.
Publisher
Royal Society of Chemistry (RSC)
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://pubs.rsc.org/en/content/articlepdf/2016/CP/C6CP00916F
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