Boundary-induced nucleation control: a theoretical perspective
Author:
Affiliation:
1. Institute for Physical Chemistry
2. University of Münster
3. 48149 Münster
4. Germany
5. Physikalisches Institut and Center for Nanotechnology (CeNTech)
6. Jiangsu Key Laboratory for Carbon-based Functional Materials & Devices Collaborative
Abstract
The pre-patterning of a substrate to create energetically more attractive or repulsive regions allows one to generate a variety of structures in physical vapor deposition experiments.
Funder
Deutsche Forschungsgemeinschaft
Publisher
Royal Society of Chemistry (RSC)
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://pubs.rsc.org/en/content/articlepdf/2018/CP/C7CP02348K
Reference40 articles.
1. J. E. Mahan , Physical Vapor Deposition of Thin Films , John Wiley & Sons Inc. , 2000
2. D. M. Mattox , Handbook of Physical Vapor Deposition (PVD) Processing , William Andrew Publishing , 2010
3. T. Michely and J.Krug , Islands, Mounds and Atoms , Springer-Verlag Berlin Heidelberg , 2004
4. Morphological evolution during epitaxial thin film growth: Formation of 2D islands and 3D mounds
5. Level set simulation of directed self-assembly during epitaxial growth
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