Selective electroless deposition of cobalt using amino-terminated SAMs
Author:
Affiliation:
1. KU Leuven, Department of Chemistry, Faculty of Science
2. 3001 Leuven
3. Belgium
4. Imec
5. Ghent University, Department of Solid State Sciences
6. 9000 Ghent
Abstract
Selective electroless deposition of Co directly on dielectric surfaces, promoted by amino-terminated organic films in combination with a selective Pd catalyst.
Funder
Electronic Components and Systems for European Leadership
Horizon 2020
Publisher
Royal Society of Chemistry (RSC)
Subject
Materials Chemistry,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2019/TC/C9TC00145J
Reference64 articles.
1. International Roadmap for Devices and Systems (IRDS™), IEEE , 2017
2. Technology and reliability constrained future copper interconnects. II. Performance implications
3. Thickness dependence of the resistivity of platinum-group metal thin films
4. Highly Scaled Ruthenium Interconnects
Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Understanding electromigration failure behaviors of narrow cobalt lines and the mechanism of reliability enhancement for extremely dilute alloying of manganese oxide;Journal of Alloys and Compounds;2024-01
2. Thermal Stability and Orthogonal Functionalization of Organophosphonate Self-Assembled Monolayers as Potential Liners for Cu Interconnect;ACS Omega;2023-10-13
3. Revolution of next-generation interconnect materials and key processes for advanced chips in post-moore era;SCIENTIA SINICA Chimica;2023-08-17
4. Barrier/seed system for electroless metallization on complex surfaces using (aminomethylaminoethyl)phenethyltrimethoxysilane self-assembled films;Journal of Vacuum Science & Technology B;2023-07-01
5. Layer-by-layer deposition of breakdown-strengthened Co(Ni) films by modulating termination time over the redox replacement;Materials Chemistry and Physics;2023-02
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3