Tuneable polarity and enhanced piezoelectric response of ZnO thin films grown by metal–organic chemical vapour deposition through the flow rate adjustment-Reference-Cited by-同舟云学术

Tuneable polarity and enhanced piezoelectric response of ZnO thin films grown by metal–organic chemical vapour deposition through the flow rate adjustment

Published:2022 Issue:1 Volume:3 Page:498-513
ISSN:2633-5409
Container-title:Materials Advances
language:en
Short-container-title:Mater. Adv.

Author:

Bui Quang Chieu¹²³^ORCID,Ardila Gustavo²^ORCID,Roussel Hervé¹,Jiménez Carmen¹^ORCID,Gélard Isabelle¹^ORCID,Chaix-Pluchery Odette¹^ORCID,Mescot Xavier²,Boubenia Sarah³,Salem Bassem³^ORCID,Consonni Vincent¹^ORCID

Affiliation:

1. Université Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000 Grenoble, France

2. Université Grenoble Alpes, CNRS, Grenoble INP, IMEP-LAHC, F-38000 Grenoble, France

3. Université Grenoble Alpes, CNRS, LTM, F-38054 Grenoble Cedex, France

Abstract

The formation process of ZnO thin films grown by pulsed-liquid injection metal–organic chemical vapour deposition (PLI-MOCVD) has a major impact on its morphological, structural, electrical and piezoelectric properties, but their correlation has not been elucidated yet nor decoupled from the thickness effects.

Funder

Agence Nationale de la Recherche

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science,Chemistry (miscellaneous)

Link

http://pubs.rsc.org/en/content/articlepdf/2022/MA/D1MA00921D

Reference51 articles.

1. Towards Self-Powered Nanosystems: From Nanogenerators to Nanopiezotronics

2. An overview of lead-free piezoelectric materials and devices

3. A review on piezo-/ferro-electric properties of morphologically diverse ZnO nanostructures

4. A review on ZnO-based piezoelectric nanogenerators: Synthesis, characterization techniques, performance enhancement and applications

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High figure-of-merit in Al-doped ZnO thin films grown by ALD through the Al content adjustment;Materialia;2023-09

2. Correlation between the Dimensions and Piezoelectric Properties of ZnO Nanowires Grown by PLI-MOCVD with Different Flow Rates;Nanoenergy Advances;2023-08-02

3. Tuning the texture and polarity of ZnO thin films deposited by spatial atomic layer deposition through the addition of a volatile shape-directing agent;Materialia;2023-08

4. Significance of microstrain in impacting band gap and photoluminescence behavior of Ce-doped ZnO thin films deposited via sol-gel process;Physica Scripta;2023-01-23

5. Micro-strain governed photoluminescence emission intensity of sol-gel spin coated Eu doped ZnO thin films;Thin Solid Films;2022-11