Tuneable polarity and enhanced piezoelectric response of ZnO thin films grown by metal–organic chemical vapour deposition through the flow rate adjustment-Reference-Cited by-同舟云学术

Tuneable polarity and enhanced piezoelectric response of ZnO thin films grown by metal–organic chemical vapour deposition through the flow rate adjustment

Published:2022 Issue:1 Volume:3 Page:498-513
ISSN:2633-5409
Container-title:Materials Advances
language:en
Short-container-title:Mater. Adv.

Author:

Bui Quang Chieu¹²³^ORCID,Ardila Gustavo²^ORCID,Roussel Hervé¹,Jiménez Carmen¹^ORCID,Gélard Isabelle¹^ORCID,Chaix-Pluchery Odette¹^ORCID,Mescot Xavier²,Boubenia Sarah³,Salem Bassem³^ORCID,Consonni Vincent¹^ORCID

Affiliation:

1. Université Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000 Grenoble, France

2. Université Grenoble Alpes, CNRS, Grenoble INP, IMEP-LAHC, F-38000 Grenoble, France

3. Université Grenoble Alpes, CNRS, LTM, F-38054 Grenoble Cedex, France

Abstract

The formation process of ZnO thin films grown by pulsed-liquid injection metal–organic chemical vapour deposition (PLI-MOCVD) has a major impact on its morphological, structural, electrical and piezoelectric properties, but their correlation has not been elucidated yet nor decoupled from the thickness effects.

Funder

Agence Nationale de la Recherche

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science,Chemistry (miscellaneous)

Link

http://pubs.rsc.org/en/content/articlepdf/2022/MA/D1MA00921D

Reference51 articles.

1. Towards Self-Powered Nanosystems: From Nanogenerators to Nanopiezotronics

2. An overview of lead-free piezoelectric materials and devices

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4. A review on ZnO-based piezoelectric nanogenerators: Synthesis, characterization techniques, performance enhancement and applications

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